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The Kinetics of Dopant-Enhanced Solid Phase Epitaxy in H-Free Amorphous Silicon Layers

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Date

1999

Authors

McCallum, J.

Journal Title

Journal ISSN

Volume Title

Publisher

Elsevier

Abstract

Description

Keywords

Citation

URI

http://hdl.handle.net/1885/93384

Collections

ANU Research Publications

Source

Nuclear Instruments and Methods in Physics Research: Section B

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1016/S0168-583X(98)00671-5

Restricted until

2099-12-31

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1-s2.0-S0168583X98006715-main.pdf (294.77 KB)

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