Trap-Limited Migration of Vacancy-Type Defects in 7.5 keV H - -Implanted Si

Date

2002

Authors

Deenapanray, Prakash

Journal Title

Journal ISSN

Volume Title

Publisher

American Institute of Physics (AIP)

Abstract

Description

Keywords

Citation

Source

Applied Physics Letters

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

Restricted until