Substrate-dependent structure, microstructure, composition and properties of nanostructured TiN films

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dc.contributor.authorMangalampalli, S.R.N. Kiran
dc.contributor.authorKrishna, Ghanashyam
dc.contributor.authorPadmanabhan, K.A.
dc.date.accessioned2015-12-10T23:22:49Z
dc.date.issued2011
dc.date.updated2016-02-24T09:59:08Z
dc.description.abstractTitanium nitride films of a thickness of ∼1.5 μm were deposited on amorphous and crystalline substrates by DC reactive magnetron sputtering at ambient temperature with 100% nitrogen in the sputter gas. The growth of nanostructured, i.e. crystalline nan
dc.identifier.issn0038-1098
dc.identifier.urihttp://hdl.handle.net/1885/66676
dc.publisherPergamon-Elsevier Ltd
dc.sourceSolid State Communications
dc.subjectKeywords: A. Thin films; Ambient temperatures; Amorphous substrate; Chemical compositions; Crystalline substrates; D. Mechanical properties; D. Optical properties; DC reactive magnetron sputtering; Different substrates; Lanthanum aluminate; Lower hardness; Modulus A. Thin films; D. Mechanical properties; D. Optical properties
dc.titleSubstrate-dependent structure, microstructure, composition and properties of nanostructured TiN films
dc.typeJournal article
local.bibliographicCitation.issue7
local.bibliographicCitation.lastpage563
local.bibliographicCitation.startpage561
local.contributor.affiliationMangalampalli, S.R.N. Kiran, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationKrishna, Ghanashyam, University of Hyderabad
local.contributor.affiliationPadmanabhan, K.A., University of Muenster
local.contributor.authoremailu5263660@anu.edu.au
local.contributor.authoruidMangalampalli, S.R.N. Kiran, u5263660
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor020400 - CONDENSED MATTER PHYSICS
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
local.identifier.ariespublicationU3488905xPUB1324
local.identifier.citationvolume151
local.identifier.doi10.1016/j.ssc.2011.01.009
local.identifier.scopusID2-s2.0-79952038589
local.identifier.uidSubmittedByU3488905
local.type.statusPublished Version

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