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Charge Density in Atmospheric Pressure Chemical Vapor Deposition TiO 2 on SiO 2 -Passivated Silicon

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dc.contributor.authorMcIntosh, Keith
dc.contributor.authorBaker-Finch, Simeon
dc.contributor.authorGrant, Nicholas
dc.contributor.authorThomson, Andrew
dc.contributor.authorSingh, Sonita
dc.contributor.authorBaikie, Iain D.
dc.date.accessioned2015-12-08T22:38:05Z
dc.date.issued2009
dc.date.updated2016-02-24T11:17:24Z
dc.description.abstractThe charge density of a TiO2 film deposited on a SiO2 -passivated silicon wafer is determined. The TiO2 is deposited by atmospheric pressure chemical vapor deposition at 400°C, and the SiO2 is grown thermally at 950°C. This TiO2 - SiO2 stack is a useful
dc.identifier.issn0013-4651
dc.identifier.urihttp://hdl.handle.net/1885/35794
dc.publisherElectrochemical Society Inc
dc.sourceJournal of the Electrochemical Society
dc.subjectKeywords: Atmospheric pressure chemical vapor deposition; Capacitance voltage; Conservative limits; Front surfaces; High-efficiency solar cells; Kelvin Probe measurements; Low density; Optical transmissions; Photoconductance; TiO; Upper limits; Atmospheric chemistr
dc.titleCharge Density in Atmospheric Pressure Chemical Vapor Deposition TiO 2 on SiO 2 -Passivated Silicon
dc.typeJournal article
local.bibliographicCitation.issue11
local.bibliographicCitation.lastpageG195
local.bibliographicCitation.startpageG190
local.contributor.affiliationMcIntosh, Keith, College of Engineering and Computer Science, ANU
local.contributor.affiliationBaker-Finch, Simeon, College of Medicine, Biology and Environment, ANU
local.contributor.affiliationGrant, Nicholas, College of Engineering and Computer Science, ANU
local.contributor.affiliationThomson, Andrew, College of Engineering and Computer Science, ANU
local.contributor.affiliationSingh, Sonita, College of Engineering and Computer Science, ANU
local.contributor.affiliationBaikie, Iain D, KP Technology Limited
local.contributor.authoruidMcIntosh, Keith, u4249405
local.contributor.authoruidBaker-Finch, Simeon, u3938976
local.contributor.authoruidGrant, Nicholas, u4488538
local.contributor.authoruidThomson, Andrew, u4323527
local.contributor.authoruidSingh, Sonita, u4090724
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor050200 - ENVIRONMENTAL SCIENCE AND MANAGEMENT
local.identifier.ariespublicationu4692404xPUB128
local.identifier.citationvolume156
local.identifier.doi10.1149/1.3216029
local.identifier.scopusID2-s2.0-70349742577
local.identifier.thomsonID000270457600057
local.type.statusPublished Version

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