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Transmission Electron Microscopy Characterization of Secondary Defects Created by MeV Si, Ge, and Sn Implantation in Silicon

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dc.contributor.authorWong-Leung, Jennifer
dc.contributor.authorFatima, S
dc.contributor.authorJagadish, Chennupati
dc.contributor.authorFitz Gerald, John
dc.contributor.authorChou, C
dc.contributor.authorZou, Jin
dc.contributor.authorCockayne, David John Hugh
dc.date.accessioned2015-12-07T22:48:46Z
dc.date.issued2000
dc.date.updated2015-12-07T12:01:54Z
dc.description.abstractExtended defects created in Si by ion implantation to doses below the amorphization threshold have been studied after annealing at 800 °C for 15 min. The implant species were the group IV elements Si, Ge, and Sn, and structural defects created by similar
dc.identifier.issn0021-8979
dc.identifier.urihttp://hdl.handle.net/1885/26487
dc.publisherAmerican Institute of Physics (AIP)
dc.sourceJournal of Applied Physics
dc.titleTransmission Electron Microscopy Characterization of Secondary Defects Created by MeV Si, Ge, and Sn Implantation in Silicon
dc.typeJournal article
local.bibliographicCitation.lastpage1318
local.bibliographicCitation.startpage1312
local.contributor.affiliationWong-Leung, Yin-Yin (Jennifer), College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationFatima, S, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationFitz Gerald, John, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationChou, C, Pacific Solar
local.contributor.affiliationZou, Jin, University of Queensland
local.contributor.affiliationCockayne, David John Hugh, University of Oxford
local.contributor.authoruidWong-Leung, Yin-Yin (Jennifer), u9607716
local.contributor.authoruidFatima, S, u970552
local.contributor.authoruidJagadish, Chennupati, u9212349
local.contributor.authoruidFitz Gerald, John, u8001315
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor020406 - Surfaces and Structural Properties of Condensed Matter
local.identifier.ariespublicationMigratedxPub45
local.identifier.citationvolume88
local.identifier.scopusID2-s2.0-0012022111
local.type.statusPublished Version

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