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Evaluation of the Bulk Lifetime of Silicon Wafers by Immersion in Hydrofluoric Acid and Illumination

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Date

2012

Authors

Grant, Nicholas
McIntosh, Keith
Tan, Jason

Journal Title

Journal ISSN

Volume Title

Publisher

The Electrochemical Society

Abstract

We report on a procedure to temporarily attain a very high level of surface passivation for silicon wafers at room temperature. When applied during a photoconductance measurement, the procedure permits an accurate assessment of the bulk lifetime, even for

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Keywords

Citation

URI

http://hdl.handle.net/1885/18973

Collections

ANU Research Publications

Source

ECS Journal of Solid State Science and Technology

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1149/2.003202jss

Restricted until

2037-12-31

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01_Grant_Evaluation_of_the_Bulk_2012.pdf (2.27 MB)

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