Evaluation of the Bulk Lifetime of Silicon Wafers by Immersion in Hydrofluoric Acid and Illumination

Date

2012

Authors

Grant, Nicholas
McIntosh, Keith
Tan, Jason

Journal Title

Journal ISSN

Volume Title

Publisher

The Electrochemical Society

Abstract

We report on a procedure to temporarily attain a very high level of surface passivation for silicon wafers at room temperature. When applied during a photoconductance measurement, the procedure permits an accurate assessment of the bulk lifetime, even for

Description

Keywords

Citation

Source

ECS Journal of Solid State Science and Technology

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1149/2.003202jss

Restricted until

2037-12-31