Evaluation of the Bulk Lifetime of Silicon Wafers by Immersion in Hydrofluoric Acid and Illumination
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Grant, Nicholas
McIntosh, Keith
Tan, Jason
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The Electrochemical Society
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We report on a procedure to temporarily attain a very high level of surface passivation for silicon wafers at room temperature. When applied during a photoconductance measurement, the procedure permits an accurate assessment of the bulk lifetime, even for
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ECS Journal of Solid State Science and Technology
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2037-12-31
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