Skip navigation
Skip navigation

Pulsed Anodic Oxidation of GaAs for Impurity-free Interdiffusion of GaAs/AlGaAs Quantum Wells

Deenapanray, Prakash; Fu, Lan; Petravic, Mladen; Jagadish, Chennupati; Gong, Bin; Lamb, Robert Norman

Description

The use of pulsed anodic oxidation of GaAs for impurity-free quantum well interdiffusion is demonstrated. The GaAs capping layer of a single GaAs/Al0.3Ga0.7 As quantum well structure was oxidized and rapid thermal annealing (RTA) at 900 °C for 60 s was c

dc.contributor.authorDeenapanray, Prakash
dc.contributor.authorFu, Lan
dc.contributor.authorPetravic, Mladen
dc.contributor.authorJagadish, Chennupati
dc.contributor.authorGong, Bin
dc.contributor.authorLamb, Robert Norman
dc.date.accessioned2015-12-13T23:19:45Z
dc.date.available2015-12-13T23:19:45Z
dc.identifier.issn0142-2421
dc.identifier.urihttp://hdl.handle.net/1885/90414
dc.description.abstractThe use of pulsed anodic oxidation of GaAs for impurity-free quantum well interdiffusion is demonstrated. The GaAs capping layer of a single GaAs/Al0.3Ga0.7 As quantum well structure was oxidized and rapid thermal annealing (RTA) at 900 °C for 60 s was c
dc.publisherJohn Wiley & Sons Inc
dc.sourceSurface and Interface Analysis
dc.subjectKeywords: Anodic oxidation; Crystal defects; Deep level transient spectroscopy; Epitaxial growth; Interdiffusion (solids); Rapid thermal annealing; Semiconducting aluminum compounds; Semiconducting films; Semiconducting gallium arsenide; X ray photoelectron spectro
dc.titlePulsed Anodic Oxidation of GaAs for Impurity-free Interdiffusion of GaAs/AlGaAs Quantum Wells
dc.typeJournal article
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.citationvolume29
dc.date.issued2000
local.identifier.absfor091299 - Materials Engineering not elsewhere classified
local.identifier.absfor020501 - Classical and Physical Optics
local.identifier.ariespublicationMigratedxPub20762
local.type.statusPublished Version
local.contributor.affiliationDeenapanray, Prakash, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationFu, Lan, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationPetravic, Mladen, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationGong, Bin, University of New South Wales
local.contributor.affiliationLamb, Robert Norman, University of New South Wales
local.bibliographicCitation.startpage754
local.bibliographicCitation.lastpage760
local.identifier.doi10.1002/1096-9918(200011)29:11<754::AID-SIA924>3.0.CO;2-D
dc.date.updated2015-12-12T09:00:47Z
local.identifier.scopusID2-s2.0-0034321361
CollectionsANU Research Publications

Download

There are no files associated with this item.


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  19 May 2020/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator