Pulsed Anodic Oxidation of GaAs for Impurity-free Interdiffusion of GaAs/AlGaAs Quantum Wells

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dc.contributor.authorDeenapanray, Prakash
dc.contributor.authorFu, Lan
dc.contributor.authorPetravic, Mladen
dc.contributor.authorJagadish, Chennupati
dc.contributor.authorGong, Bin
dc.contributor.authorLamb, Robert Norman
dc.date.accessioned2015-12-13T23:19:45Z
dc.date.available2015-12-13T23:19:45Z
dc.date.issued2000
dc.date.updated2015-12-12T09:00:47Z
dc.description.abstractThe use of pulsed anodic oxidation of GaAs for impurity-free quantum well interdiffusion is demonstrated. The GaAs capping layer of a single GaAs/Al0.3Ga0.7 As quantum well structure was oxidized and rapid thermal annealing (RTA) at 900 °C for 60 s was c
dc.identifier.issn0142-2421
dc.identifier.urihttp://hdl.handle.net/1885/90414
dc.publisherJohn Wiley & Sons Inc
dc.sourceSurface and Interface Analysis
dc.subjectKeywords: Anodic oxidation; Crystal defects; Deep level transient spectroscopy; Epitaxial growth; Interdiffusion (solids); Rapid thermal annealing; Semiconducting aluminum compounds; Semiconducting films; Semiconducting gallium arsenide; X ray photoelectron spectro
dc.titlePulsed Anodic Oxidation of GaAs for Impurity-free Interdiffusion of GaAs/AlGaAs Quantum Wells
dc.typeJournal article
local.bibliographicCitation.lastpage760
local.bibliographicCitation.startpage754
local.contributor.affiliationDeenapanray, Prakash, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationFu, Lan, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationPetravic, Mladen, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationJagadish, Chennupati, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationGong, Bin, University of New South Wales
local.contributor.affiliationLamb, Robert Norman, University of New South Wales
local.contributor.authoruidDeenapanray, Prakash, u4018937
local.contributor.authoruidFu, Lan, u9715386
local.contributor.authoruidPetravic, Mladen, u8905251
local.contributor.authoruidJagadish, Chennupati, u9212349
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor091299 - Materials Engineering not elsewhere classified
local.identifier.absfor020501 - Classical and Physical Optics
local.identifier.ariespublicationMigratedxPub20762
local.identifier.citationvolume29
local.identifier.doi10.1002/1096-9918(200011)29:11<754::AID-SIA924>3.0.CO;2-D
local.identifier.scopusID2-s2.0-0034321361
local.type.statusPublished Version

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