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Effect of Ion Species on Implantation-produced Disorder in GaN at Liquid Nitrogen Temperature

Kucheyev, Sergei; Williams, James; Zou, Jin; Li, Gang; Jagadish, Chennupati; Titov, A I


The effect of ion species on the damage buildup behavior in wurtzite GaN under bombardment at liquid nitrogen temperature (LN2) is studied by a combination of Rutherford backscattering/channeling spectrometry and transmission electron microscopy. Results

CollectionsANU Research Publications
Date published: 2002
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/S0168-583X(01)01309-X


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