Effect of Ion Species on Implantation-produced Disorder in GaN at Liquid Nitrogen Temperature
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Kucheyev, Sergei; Williams, James; Zou, Jin; Li, Gang; Jagadish, Chennupati; Titov, A I
Description
The effect of ion species on the damage buildup behavior in wurtzite GaN under bombardment at liquid nitrogen temperature (LN2) is studied by a combination of Rutherford backscattering/channeling spectrometry and transmission electron microscopy. Results
Collections | ANU Research Publications |
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Date published: | 2002 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/71934 |
Source: | Nuclear Instruments and Methods in Physics Research: Section B |
DOI: | 10.1016/S0168-583X(01)01309-X |
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01_Kucheyev_Effect_of_Ion_Species_on_2002.pdf | 157.59 kB | Adobe PDF | Request a copy |
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