Electrical Isolation of n-type InP by Ion Bombardment: Dose Dependence and Thermal Stability
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Boudinov, H
de Souza, J P
Jagadish, Chennupati
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Elsevier
Abstract
The increasing of the sheet resistance (Rs) of n-type conductive InP layers during proton irradiation and the stability of the formed isolation during post-irradiation annealing were investigated. It was found that the threshold dose (Dth) to convert the
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Nuclear Instruments and Methods in Physics Research: Section B
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2037-12-31