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Electrical Isolation of n-type InP by Ion Bombardment: Dose Dependence and Thermal Stability

Boudinov, H; de Souza, J P; Jagadish, Chennupati


The increasing of the sheet resistance (Rs) of n-type conductive InP layers during proton irradiation and the stability of the formed isolation during post-irradiation annealing were investigated. It was found that the threshold dose (Dth) to convert the

CollectionsANU Research Publications
Date published: 2001
Type: Journal article
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/S0168-583X(00)00529-2


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