Skip navigation
Skip navigation

Electrical Isolation of n-type InP by Ion Bombardment: Dose Dependence and Thermal Stability

Boudinov, H; de Souza, J P; Jagadish, Chennupati

Description

The increasing of the sheet resistance (Rs) of n-type conductive InP layers during proton irradiation and the stability of the formed isolation during post-irradiation annealing were investigated. It was found that the threshold dose (Dth) to convert the

CollectionsANU Research Publications
Date published: 2001
Type: Journal article
URI: http://hdl.handle.net/1885/68308
Source: Nuclear Instruments and Methods in Physics Research: Section B
DOI: 10.1016/S0168-583X(00)00529-2

Download

File Description SizeFormat Image
01_Boudinov_Electrical_Isolation_of_n-type_2001.pdf212.53 kBAdobe PDF    Request a copy


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  20 July 2017/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator