Electrical Isolation of n-type InP by Ion Bombardment: Dose Dependence and Thermal Stability
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Boudinov, H; de Souza, J P; Jagadish, Chennupati
Description
The increasing of the sheet resistance (Rs) of n-type conductive InP layers during proton irradiation and the stability of the formed isolation during post-irradiation annealing were investigated. It was found that the threshold dose (Dth) to convert the
| Collections | ANU Research Publications |
|---|---|
| Date published: | 2001 |
| Type: | Journal article |
| URI: | http://hdl.handle.net/1885/68308 |
| Source: | Nuclear Instruments and Methods in Physics Research: Section B |
| DOI: | 10.1016/S0168-583X(00)00529-2 |
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| File | Description | Size | Format | Image |
|---|---|---|---|---|
| 01_Boudinov_Electrical_Isolation_of_n-type_2001.pdf | 212.53 kB | Adobe PDF | Request a copy |
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