Patterning of inorganic polymer glass waveguiding films by dry etching
Date
2008
Authors
Madden, Steve
Zhang, Yang
Luther-Davies, Barry
Charters, Robbie
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Publisher
SPIE - The International Society for Optical Engineering
Abstract
Polymer waveguides have long been of interest for low cost integrated optical devices. Inorganic Polymer glasses are a class of materials based around polysiloxanes which have many attractive features for low cost integrated optics and meet the stringent
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Keywords
Keywords: Optical waveguides; Photoresists; Reactive ion etching; Refractive index; Polymer glasses; Polymer waveguides; Reliability requirements; Integrated optics Integrated optics; Polymer waveguides; Reactive ion etching
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Source
Proceedings of SPIE - Progress in Biomedical Optics and Imaging
Type
Journal article
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Restricted until
2037-12-31
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