On the Angular Dependence of Profile Broadening in Silicon Under Oxygen and Nitrogen Bombardment
Date
2000
Authors
Petravic, Mladen
Deenapanray, Prakash
Demangel, Caroline
Moon, D-S
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Volume Title
Publisher
Elsevier
Abstract
Description
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Source
Proceedings of the 12th International Conference on Secondary Ion Mass Spetrometry
Type
Conference paper