Wafer-level flame-spray-pyrolysis deposition of gas-sensitive layers on microsensors
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Kuhne, S; Graf, M; Tricoli, Antonio; Mayer, F; Pratsinis, S.E; Hierlemann, A
Description
This paper presents a CMOS-compatible wafer-level fabrication process for monolithic CMOS/MEMS sensor systems coated with sensitive layers directly deposited by means of flame spray pyrolysis (FSP). Microhotplate (νHP)-based devices, featuring an FSP dir
Collections | ANU Research Publications |
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Date published: | 2008 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/23165 |
Source: | Journal of Micromechanics and Microengineering |
DOI: | 10.1088/0960-1317/18/3/035040 |
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01_Kuhne_Wafer-level_2008.pdf | 2.27 MB | Adobe PDF | Request a copy |
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