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A robust control approach for high-speed nanopositioning applications

Habibullah, H.; Pota, Hemanshu R.; Petersen, Ian


In this paper, a robust controller for the positioning of a piezoelectric tube scanner (PTS) used in an atomic force microscope (AFM) is proposed. A minimax linear quadratic Gaussian (LQG) controller is designed based on an uncertain system model which is constructed by measuring modeling error between the measured and model frequency response. This controller is robust against uncertainties introduced as a result of spillover dynamics of the scanner at frequencies higher than the first...[Show more]

CollectionsANU Research Publications
Date published: 2019
Type: Journal article
Source: Sensors and Actuators A
DOI: 10.1016/j.sna.2019.03.045


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