A robust control approach for high-speed nanopositioning applications

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dc.contributor.authorHabibullah, H.
dc.contributor.authorPota, Hemanshu R.
dc.contributor.authorPetersen, Ian
dc.date.accessioned2020-02-28T03:35:10Z
dc.date.issued2019
dc.date.updated2019-11-25T07:37:45Z
dc.description.abstractIn this paper, a robust controller for the positioning of a piezoelectric tube scanner (PTS) used in an atomic force microscope (AFM) is proposed. A minimax linear quadratic Gaussian (LQG) controller is designed based on an uncertain system model which is constructed by measuring modeling error between the measured and model frequency response. This controller is robust against uncertainties introduced as a result of spillover dynamics of the scanner at frequencies higher than the first resonance frequency (900 Hz) of the scanner and the variation of plant transfer function due to temperature, humidity, and duration of operation. The proposed controller is applied to the PTS in the AFM used in the experiments to evaluate the performance of the proposed method. It is observed that the proposed scheme provides up to 12 dB closed-loop damping of the resonant mode to track the reference triangular signal. The robust performance of the proposed controller has been investigated for 0–1.96 g sample mass variation. A high positioning accuracy up to 125 Hz frequency is achieved by reducing scanner's vibration and tracking error. Higher-quality imaging up to 125 Hz scanning frequency is achieved compared to the existing PI controller and some other existing methods. This control technique may be applied to control vibration for the systems with changing frequency response due to uncertainties, such as vibration control of disc-drive system.
dc.format.mimetypeapplication/pdfen_AU
dc.identifier.issn0924-4247en_AU
dc.identifier.urihttp://hdl.handle.net/1885/201963
dc.language.isoen_AUen_AU
dc.publisherElsevieren_AU
dc.rights© 2019 Elsevier B.V.en_AU
dc.sourceSensors and Actuators Aen_AU
dc.titleA robust control approach for high-speed nanopositioning applicationsen_AU
dc.typeJournal articleen_AU
local.bibliographicCitation.lastpage148en_AU
local.bibliographicCitation.startpage137en_AU
local.contributor.affiliationHabibullah, H., Southern Cross Universityen_AU
local.contributor.affiliationPota, Hemanshu R., University of New South Walesen_AU
local.contributor.affiliationPetersen, Ian, College of Engineering and Computer Science, ANUen_AU
local.contributor.authoremailu4036493@anu.edu.auen_AU
local.contributor.authoruidPetersen, Ian, u4036493en_AU
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor090602 - Control Systems, Robotics and Automationen_AU
local.identifier.absseo970109 - Expanding Knowledge in Engineeringen_AU
local.identifier.ariespublicationu3102795xPUB3309en_AU
local.identifier.citationvolume292en_AU
local.identifier.doi10.1016/j.sna.2019.03.045en_AU
local.identifier.scopusID2-s2.0-85064414275
local.identifier.uidSubmittedByu3102795en_AU
local.publisher.urlhttps://www.elsevier.com/en-auen_AU
local.type.statusPublished Versionen_AU

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