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Direct comparison of boron, phosphorus, and aluminum gettering of iron in crystalline silicon

Phang, S. P.; Macdonald, D.


This paper presents a direct quantitative comparison of the effectiveness of borondiffusion, phosphorus diffusion, and aluminumalloying in removing interstitial iron in crystalline silicon in the context of silicon solar cells. Phosphorus diffusion gettering was effective in removing more than 90% of the interstitial iron across a range of diffusion temperatures, sheet resistances, and iron doses. Even relatively light phosphorus diffusions (145 Ω/□) were found to give very effective gettering,...[Show more]

CollectionsANU Research Publications
Date published: 2011-04-13
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.3569890


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