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Novel matching lens and spherical ionizer for a cesium sputter ion source

Weisser, David; Lobanov, Nikolai; Hausladen, P; Fifield, L Keith; Wallace, Howard; Tims, Stephen; Apushkinsky, E

Description

The beam optics of a multi-sample sputter ion source, based on the NECMCSNICS, has been modified to accommodate cathode voltages higher than 5 kV and dispenses with the nominal extractor. The cathode voltage in Cs sputter sources plays the role of the classical extractor accomplishing the acceleration of beam particles from eV to keV energy, minimizing space charge effects and interactions between the beam and residual gas. The higher the cathode voltage, the smaller are these...[Show more]

CollectionsANU Research Publications
Date published: 2009-06-04T06:13:44Z
Type: Journal article
URI: http://hdl.handle.net/10440/411
http://digitalcollections.anu.edu.au/handle/10440/411
Source: Pramana

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