Novel matching lens and spherical ionizer for a cesium sputter ion source

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dc.contributor.authorWeisser, David
dc.contributor.authorLobanov, Nikolai
dc.contributor.authorHausladen, P
dc.contributor.authorFifield, L Keith
dc.contributor.authorWallace, Howard
dc.contributor.authorTims, Stephen
dc.contributor.authorApushkinsky, E
dc.date.accessioned2009-06-04T06:13:44Zen_US
dc.date.accessioned2010-12-20T06:06:12Z
dc.date.available2009-06-04T06:13:44Zen_US
dc.date.available2010-12-20T06:06:12Z
dc.date.issued2009-06-04T06:13:44Zen_US
dc.date.updated2015-12-11T08:16:20Z
dc.description.abstractThe beam optics of a multi-sample sputter ion source, based on the NECMCSNICS, has been modified to accommodate cathode voltages higher than 5 kV and dispenses with the nominal extractor. The cathode voltage in Cs sputter sources plays the role of the classical extractor accomplishing the acceleration of beam particles from eV to keV energy, minimizing space charge effects and interactions between the beam and residual gas. The higher the cathode voltage, the smaller are these contributions to the emittance growth. The higher cathode voltage also raises the Child’s law limit on the Cs current resulting in substantially increased output. The incidental focusing role of the extractor is reallocated to a deceleration Einzel lens and the velocity change needed to match to the pre-acceleration tube goes to a new electrode at the tube entrance. All electrodes are large enough to ensure that the beam fills less than 30% of the aperture to minimize aberrations. The improvements are applicable to sputter sources generally.
dc.format10 pages
dc.identifier.citationPramana 59.6 (2002): 997-1006
dc.identifier.issn0304-4289en_US
dc.identifier.urihttp://hdl.handle.net/10440/411en_US
dc.identifier.urihttp://digitalcollections.anu.edu.au/handle/10440/411
dc.publisherIndian National Science Academy
dc.rightshttp://www.ias.ac.in/pramana/PACTFORM.pdf "... the authors may use this work after publication ... in any or all of the following ways without seeking permission from the Academy provided that reference to the original publication in the concerned Academy journal is always made: ... [authors may include] the published work with no changes on the author's personal website or institutional archives/repositories ... " - from journal web site (as at 18/02/10)
dc.sourcePramana
dc.source.urihttp://www.ias.ac.in/pramana/v59/p997/fulltext.pdfen_US
dc.source.urihttp://www.ias.ac.in/pramana/v59/v59no6.htmen_US
dc.subjectbeam optics
dc.subjection source
dc.subjectspace charge
dc.titleNovel matching lens and spherical ionizer for a cesium sputter ion source
dc.typeJournal article
local.bibliographicCitation.issue6
local.bibliographicCitation.lastpage1006
local.bibliographicCitation.startpage997
local.contributor.affiliationWeisser, David, Research School of Physical Sciences and Engineering, Department of Nuclear Physicsen_US
local.contributor.affiliationLobanov, Nikolai, Research School of Physical Sciences and Engineering, Department of Nuclear Physicsen_US
local.contributor.affiliationHausladen, P, Research School of Physical Sciences and Engineering, Department of Nuclear Physicsen_US
local.contributor.affiliationFifield, L Keith, Research School of Physical Sciences and Engineering, Department of Nuclear Physicsen_US
local.contributor.affiliationWallace, Howard, Research School of Physical Sciences and Engineering, Department of Nuclear Physicsen_US
local.contributor.affiliationTims, Stephen, Research School of Physical Sciences and Engineering, Department of Nuclear Physicsen_US
local.contributor.affiliationApushkinsky, E, Research School of Physical Sciences and Engineering, Department of Nuclear Physicsen_US
local.contributor.authoruidU7000894en_US
local.contributor.authoruidU9310689en_US
local.contributor.authoruidU9906569en_US
local.contributor.authoruidU8100341en_US
local.contributor.authoruidU7500186en_US
local.contributor.authoruidU4013304en_US
local.contributor.authoruidA001514en_US
local.description.refereedYes
local.identifier.absfor029904en_US
local.identifier.ariespublicationMigratedxPub3623en_US
local.identifier.citationvolume59
local.identifier.scopusID2-s2.0-0036908597
local.identifier.uidSubmittedByu9603729en_US
local.type.statusPublished Versionen_US

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