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Surface passivation of black silicon by thermal ALD deposited aluminum oxide

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dc.contributor.authorOtto, M.en
dc.contributor.authorKroll, M.en
dc.contributor.authorKäsebier, T.en
dc.contributor.authorErnst, M.en
dc.contributor.authorSalzer, R.en
dc.contributor.authorWehrspohn, R. B.en
dc.date.accessioned2026-07-01T22:41:08Z
dc.date.available2026-07-01T22:41:08Z
dc.date.issued2011en
dc.description.abstractBlack silicon (bSi) surfaces can be effectivly passivated by thermal ALD. The nanosturcures with aspect ratios up to 10 show excellent anti-reflection and light-trapping properties with absorption in the visible spectrum of over 97%.en
dc.description.statusPeer-revieweden
dc.identifier.isbn9781557529206en
dc.identifier.scopus85088345446en
dc.identifier.urihttps://hdl.handle.net/1885/733812234
dc.language.isoenen
dc.publisherOptica Publishing Groupen
dc.relation.ispartofOptical Instrumentation for Energy and Environmental Applications 2011: Renewable Energy and the Environmenten
dc.relation.ispartofseriesOptics InfoBase Conference Papersen
dc.relation.ispartofseriesSolid-State and Organic Lighting, SOLED 2011en
dc.titleSurface passivation of black silicon by thermal ALD deposited aluminum oxideen
dc.typeConference paperen
dspace.entity.typePublicationen
local.contributor.affiliationOtto, M.; Martin Luther University Halle-Wittenbergen
local.contributor.affiliationKroll, M.; Friedrich Schiller University Jenaen
local.contributor.affiliationKäsebier, T.; Friedrich Schiller University Jenaen
local.contributor.affiliationErnst, M.; School of Engineering, ANU College of Systems and Society, The Australian National Universityen
local.contributor.affiliationSalzer, R.; Fraunhofer Institute for Mechanics of Materialsen
local.contributor.affiliationWehrspohn, R. B.; Martin Luther University Halle-Wittenbergen
local.identifier.doi10.1364/e2.2011.jwe7en
local.identifier.essn2162-2701en
local.identifier.pure224b26e2-3ec0-414a-b65b-30b490eed9d8en
local.identifier.urlhttps://www.scopus.com/pages/publications/85088345446en
local.type.statusPublisheden

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