ION BEAM-INDUCED DAMAGING AND DYNAMIC ANNEALING PROCESSES IN SILICON.
Date
Authors
Short, K. T.
Chivers, D. J.
Elliman, R. G.
Liu, J.
Pogany, A. P.
Wagenfeld, H.
Williams, J. S.
Journal Title
Journal ISSN
Volume Title
Publisher
North Holland
Access Statement
Abstract
Description
Keywords
Citation
Collections
Source
Type
Book Title
Materials Research Society Symposia Proceedings
Entity type
Publication