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PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.

dc.contributor.authorWilliams, J. S.en
dc.contributor.authorChivers, D. J.en
dc.contributor.authorElliman, R. G.en
dc.contributor.authorJohnson, S. T.en
dc.contributor.authorLawson, E. M.en
dc.contributor.authorMitchell, I. V.en
dc.contributor.authorOrrman-Rossiter, K. G.en
dc.contributor.authorPogany, A. P.en
dc.contributor.authorShort, K. T.en
dc.date.accessioned2026-01-03T12:41:29Z
dc.date.available2026-01-03T12:41:29Z
dc.date.issued1984en
dc.description.statusPeer-revieweden
dc.format.extent6en
dc.identifier.isbn0444008691en
dc.identifier.issn0272-9172en
dc.identifier.otherORCID:/0000-0002-1304-4219/work/167651163en
dc.identifier.scopus0021312579en
dc.identifier.urihttps://hdl.handle.net/1885/733803421
dc.language.isoenen
dc.publisherNorth Hollanden
dc.relation.ispartofMaterials Research Society Symposia Proceedingsen
dc.relation.ispartofseriesMaterials Research Society Symposia Proceedingsen
dc.titlePRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.en
dc.typeConference paperen
dspace.entity.typePublicationen
local.bibliographicCitation.lastpage210en
local.bibliographicCitation.startpage205en
local.contributor.affiliationWilliams, J. S.; Department of Electronic Materials Engineering, Research School of Physics, ANU College of Science and Medicine, The Australian National Universityen
local.contributor.affiliationElliman, R. G.; Department of Electronic Materials Engineering, Research School of Physics, ANU College of Science and Medicine, The Australian National Universityen
local.identifier.pureffdb61ab-8df0-4513-ac1c-8a685a540e53en
local.identifier.urlhttps://www.scopus.com/pages/publications/0021312579en
local.type.statusPublisheden

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