PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.
| dc.contributor.author | Williams, J. S. | en |
| dc.contributor.author | Chivers, D. J. | en |
| dc.contributor.author | Elliman, R. G. | en |
| dc.contributor.author | Johnson, S. T. | en |
| dc.contributor.author | Lawson, E. M. | en |
| dc.contributor.author | Mitchell, I. V. | en |
| dc.contributor.author | Orrman-Rossiter, K. G. | en |
| dc.contributor.author | Pogany, A. P. | en |
| dc.contributor.author | Short, K. T. | en |
| dc.date.accessioned | 2026-01-03T12:41:29Z | |
| dc.date.available | 2026-01-03T12:41:29Z | |
| dc.date.issued | 1984 | en |
| dc.description.status | Peer-reviewed | en |
| dc.format.extent | 6 | en |
| dc.identifier.isbn | 0444008691 | en |
| dc.identifier.issn | 0272-9172 | en |
| dc.identifier.other | ORCID:/0000-0002-1304-4219/work/167651163 | en |
| dc.identifier.scopus | 0021312579 | en |
| dc.identifier.uri | https://hdl.handle.net/1885/733803421 | |
| dc.language.iso | en | en |
| dc.publisher | North Holland | en |
| dc.relation.ispartof | Materials Research Society Symposia Proceedings | en |
| dc.relation.ispartofseries | Materials Research Society Symposia Proceedings | en |
| dc.title | PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION. | en |
| dc.type | Conference paper | en |
| dspace.entity.type | Publication | en |
| local.bibliographicCitation.lastpage | 210 | en |
| local.bibliographicCitation.startpage | 205 | en |
| local.contributor.affiliation | Williams, J. S.; Department of Electronic Materials Engineering, Research School of Physics, ANU College of Science and Medicine, The Australian National University | en |
| local.contributor.affiliation | Elliman, R. G.; Department of Electronic Materials Engineering, Research School of Physics, ANU College of Science and Medicine, The Australian National University | en |
| local.identifier.pure | ffdb61ab-8df0-4513-ac1c-8a685a540e53 | en |
| local.identifier.url | https://www.scopus.com/pages/publications/0021312579 | en |
| local.type.status | Published | en |