PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.

Williams, J. S.; Chivers, D. J.; Elliman, R. G.; Johnson, S. T.; Lawson, E. M.; Mitchell, I. V.; Orrman-Rossiter, K. G.; Pogany, A. P.; Short, K. T.

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PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.

Date

1984

Authors

Williams, J. S.

Chivers, D. J.

Elliman, R. G.

Johnson, S. T.

Lawson, E. M.

Mitchell, I. V.

Orrman-Rossiter, K. G.

Pogany, A. P.

Short, K. T.

Publisher

North Holland

URI

https://hdl.handle.net/1885/733803421

Collections

ANU Research Publications

Type

Conference paper

Book Title

Materials Research Society Symposia Proceedings

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Publication

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Cultural advice

PRODUCTION OF POROUS STRUCTURES ON Si, Ge AND GaAs BY HIGH DOSE ION IMPLANTATION.

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