Fabrication of low loss Ge₃₃As₁₂Se₅₅ (AMTIR-1) planar waveguides

Abstract

The authors describe the fabrication of low loss Ge₃₃As₁₂Se₅₅ rib waveguides. Pulsed laser deposition was used to obtain high quality, dense films with the same stoichiometry as the bulk glass, while standard semiconductor processing was used to pattern the waveguides. They obtained rib waveguides of 3, 4, and 5μm wide with propagation losses (0.3dB∕cm at 1550nm) more than ten times lower than previously reported for this material. Show more