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The impact of SiO2/SiN\rm x stack thickness on laser doping of silicon solar cell

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Date

2014

Authors

Xu, Lujia
Weber, Klaus
Phang, Sieu Pheng
Hamieri, Ziv
Franklin, Evan
Fell, Andreas

Journal Title

Journal ISSN

Volume Title

Publisher

IEEE Electron Devices Society

Abstract

Laser doping of semiconductors has been the subject of intense research over the past decades. Previous work indicates that the use of SiO 2/SiN \rm x stacks instead of a single dielectric film as the anti-reflection coating and passivation layer results

Description

Keywords

Citation

URI

http://hdl.handle.net/1885/69769

Collections

ANU Research Publications

Source

IEEE Journal of Photovoltaics

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1109/JPHOTOV.2014.2298097

Restricted until

2037-12-31

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01_Xu_The_impact_of_SiO2/SiN\rm_x_2014.pdf (556.8 KB)

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