Graded silicon nitride films: Optics and passivation

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dc.contributor.authorThomson, Andrew
dc.contributor.authorWan, Yimao
dc.contributor.authorLal, Niraj
dc.contributor.authorElliman, Robert
dc.date.accessioned2018-11-29T22:54:24Z
dc.date.available2018-11-29T22:54:24Z
dc.date.issued2015
dc.date.updated2018-11-29T07:59:44Z
dc.description.abstractThe authors describe a method for graded thin-film deposition requiring a single step that exploits the noninstantaneous replacement of reactant gases. They deposit the graded silicon-nitride films by plasma enhanced chemical vapor deposition. Channeling Rutherford backscattering measurements of the graded films find the N:Si ratio increases sixfold from the c-Si surface to air interfaces. The refractive index at the crystalline silicon/film interface was 2.96 reducing monotonically to 1.95 at the surface. The graded films achieve improved optics and surface passivation for silicon solar cells with measured surface recombination velocity of 3.9 cm/s.
dc.format.mimetypeapplication/pdfen_AU
dc.identifier.issn0734-2101
dc.identifier.urihttp://hdl.handle.net/1885/152779
dc.publisherAmerican Institute of Physics (AIP)
dc.sourceJournal of Vacuum Science and Technology A
dc.titleGraded silicon nitride films: Optics and passivation
dc.typeJournal article
dcterms.accessRightsOpen Accessen_AU
local.bibliographicCitation.issue6
local.bibliographicCitation.startpage060610-1 to 060610-5
local.contributor.affiliationThomson, Andrew, College of Engineering and Computer Science, ANU
local.contributor.affiliationWan, Yimao, College of Engineering and Computer Science, ANU
local.contributor.affiliationLal, Niraj, College of Engineering and Computer Science, ANU
local.contributor.affiliationElliman, Robert, College of Science, ANU
local.contributor.authoremailu4323527@anu.edu.au
local.contributor.authoruidThomson, Andrew, u4323527
local.contributor.authoruidWan, Yimao, u4793143
local.contributor.authoruidLal, Niraj, u3954854
local.contributor.authoruidElliman, Robert, u9012877
local.description.notesImported from ARIES
local.identifier.absfor090605 - Photodetectors, Optical Sensors and Solar Cells
local.identifier.absseo850504 - Solar-Photovoltaic Energy
local.identifier.ariespublicationU3594520xPUB660
local.identifier.citationvolume33
local.identifier.doi10.1116/1.4935101
local.identifier.scopusID2-s2.0-84946944935
local.identifier.thomsonID000365503800010
local.identifier.uidSubmittedByU3594520
local.type.statusPublished Version

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