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RELATIONSHIP BETWEEN PECVD SILICON NITRIDE FILM COMPOSITION AND SURFACE AND EDGE PASSIVATION

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Date

2007

Authors

Chen, Florence
Romijn, I
Weeber, Arthur
Tan, Jason
Hallam, Brett
Cotter, Jeffrey E

Journal Title

Journal ISSN

Volume Title

Publisher

WIP-Renewable Energies

Abstract

Description

Keywords

Citation

URI

http://hdl.handle.net/1885/55010

Collections

ANU Research Publications

Source

Proceedings of the European Photovoltaic Solar Energy Conference

Type

Conference paper

Book Title

Entity type

Access Statement

License Rights

DOI

Restricted until

2037-12-31

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Description
01_Chen_RELATIONSHIP_BETWEEN_PECVD_2007.pdf (279.8 KB)

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