Optical nonlinearity of oxygen-rich SiO x thin films
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Li, Wei
Boswell, Roderick
Samoc, Marek
Samoc, Anna
Qin, Qing Hua
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Institute of Electrical and Electronics Engineers (IEEE Inc)
Abstract
Highly oxygen-rich SiOx thin films were prepared using a helicon plasma activated reactive evaporation technique. A small second-order optical nonlinearity was observed in the as-grown films, and thermal poling induced nonlinearity in the films was found
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Electronics Letters
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2037-12-31
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