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Simulation and suppression of the gas phase pre-reaction in metal-organic chemical vapor deposition of ZnO

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dc.contributor.authorZhu, Guangyao
dc.contributor.authorGu, Shulin
dc.contributor.authorZhu, Shunming
dc.contributor.authorTang, Kun
dc.contributor.authorYe, Jiandong
dc.contributor.authorZhang, Rong
dc.contributor.authorYi, Shi
dc.contributor.authorZheng, Youdou
dc.date.accessioned2016-06-14T23:19:18Z
dc.date.issued2011
dc.date.updated2016-06-14T08:36:49Z
dc.description.abstractThe reaction mechanism and simulations of the metal-organic chemical vapor deposition reactor for ZnO film growth are presented, indicating the temperature of the reaction species. The gas phase pre-reaction can be modulated by several factors or conditions. Simulations verify the relationships between temperature and pyrolysis of precursors, and further reveal that the substrate temperature and flow rate of cooling water have great impacts on the temperature distribution. The experimental results agree with the simulations.
dc.identifier.issn0256-307X
dc.identifier.urihttp://hdl.handle.net/1885/102836
dc.publisherChinese Academy of Sciences
dc.sourceChinese Physics Letters
dc.titleSimulation and suppression of the gas phase pre-reaction in metal-organic chemical vapor deposition of ZnO
dc.typeJournal article
local.bibliographicCitation.issue11
local.bibliographicCitation.lastpage4
local.bibliographicCitation.startpage1
local.contributor.affiliationZhu, Guangyao, Nanjing University
local.contributor.affiliationGu, Shulin, Nanjing University
local.contributor.affiliationZhu, Shunming, Nanjing University
local.contributor.affiliationTang, Kun, Nanjing University
local.contributor.affiliationYe, Jiandong, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationZhang, Rong, Nanjing University
local.contributor.affiliationYi, Shi, Nanjing University
local.contributor.affiliationZheng, Youdou, Nanjing University
local.contributor.authoruidYe, Jiandong, u4920827
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor010000 - MATHEMATICAL SCIENCES
local.identifier.ariespublicationf5625xPUB7505
local.identifier.citationvolume28
local.identifier.doi10.1088/0256-307X/28/11/116803
local.identifier.scopusID2-s2.0-82055193328
local.type.statusPublished Version

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