Electron energy distribution functions in low-pressure inductively coupled bounded plasmas

Abstract

The electron energy distribution function(EEDF) in a low-pressure inductively coupled plasma confined between two infinite plates separated by 10cm is investigated using a one-dimensional particle-in-cell simulation including Monte Carlo collisions. At low pressure, where the electron mean free path is of the order of or greater than the system length, the EEDF is close to Maxwellian, except for its tail, depleted at high energy. We give clear evidence that this depletion is mostly due to the high-energy electrons escaping to the walls. As a result of the EEDF nonlocality, the break energy, for which the depletion of the Maxwellian starts, is found to track the plasma potential. At a higher pressure, the electron mean free paths of the various elastic and inelastic collisions become shorter than the system length, resulting in a loss of nonlocality and the break energy of the distribution function moves to energies lower than the plasma potential.