A new horizon in secondary neutral mass spectrometry: post-ionization using a VUV free electron laser
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Veryovkin, Igor
Calaway, Wallis F
Moore, Jerry F
Pellin, Michael J
Lewellen, John R
Li, Yuelin
Milton, Stephen V
King, Bruce Victor
Petravic, Mladen
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Elsevier
Abstract
A new time-of-flight (TOF) mass spectrometer incorporating post-ionization of sputtered neutral species with tunable vacuum ultraviolet (VUV) light generated by a free electron laser (FEL) has been developed. Capabilities of this instrument, called SPIRIT, were demonstrated by experiments with photoionization of sputtered neutral gold atoms with 125nm light generated by the VUV FEL located at Argonne National Laboratory (ANL). In a separate series of experiments with a fixed wavelength VUV light source, a 157nm F2 laser, a useful yield (atoms detected per atoms sputtered) of about 12% and a mass resolution better than 1500 were demonstrated for molybdenum.
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Applied Surface Science
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2037-12-31
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