Cultural advice

The Australian National University acknowledges, celebrates and pays our respects to the Ngunnawal and Ngambri people of the Canberra region and to all First Nations Australians on whose traditional lands we meet and work, and whose cultures are among the oldest continuing cultures in human history.

Aboriginal and Torres Strait Islander peoples are advised that ANU Library collections may include images, names, voices, and other representations of deceased persons.

Material in the collection may contain terms, language or views that reflect the period in which the item was created and may be considered inappropriate today.

Metal-assisted chemical etching for very high aspect ratio grooves in n-type silicon wafers

Simple item page
dc.contributor.authorBooker, Katherineen_AU
dc.contributor.authorBrauers, Maureenen_AU
dc.contributor.authorCrisp, Erinen_AU
dc.contributor.authorRahman, Shakiren_AU
dc.contributor.authorWeber, Klausen_AU
dc.contributor.authorStocks, Matthewen_AU
dc.contributor.authorBlakers, Andrewen_AU
dc.date.accessioned2015-12-08T22:30:30Z
dc.date.issued2014en_AU
dc.date.updated2015-12-08T09:29:36Z
dc.description.abstractMetal-assisted chemical etching (MACE) is an inexpensive, simple method for etching silicon structures, including the etching of high aspect ratio grooves. We improve on the best reported results in this area by etching grooves with aspect ratios of 65 (vertical depths 650 μm) in n-type silicon. The grooves maintain an excellent degree of verticality and show minimal width variation. We elucidate some limiting factors and demonstrate the effect of silicon surface roughness on the groove etching.en_AU
dc.identifier.issn0960-1317en_AU
dc.identifier.urihttp://hdl.handle.net/1885/34482en_AU
dc.language.isoen_AUen_AU
dc.publisherIOP Publishingen_AU
dc.rightsAuthor/s retain copyrighten_AU
dc.sourceJournal of Micromechanics and Microengineeringen_AU
dc.titleMetal-assisted chemical etching for very high aspect ratio grooves in n-type silicon wafersen_AU
dc.typeJournal articleen_AU
local.bibliographicCitation.startpage125026
local.contributor.affiliationBooker, Katherine, College of Engineering and Computer Science, ANUen_AU
local.contributor.affiliationBrauers, Maureen, College of Engineering and Computer Science, ANUen_AU
local.contributor.affiliationCrisp, Erin, College of Engineering and Computer Science, ANUen_AU
local.contributor.affiliationRahman, Shakir, College of Engineering and Computer Science, ANUen_AU
local.contributor.affiliationWeber, Klaus, College of Engineering and Computer Science, ANUen_AU
local.contributor.affiliationStocks, Matthew, College of Engineering and Computer Science, ANUen_AU
local.contributor.affiliationBlakers, Andrew, College of Engineering and Computer Science, ANUen_AU
local.contributor.authoruidBooker, Katherine, u5048780
local.contributor.authoruidBrauers, Maureen, u4749608
local.contributor.authoruidCrisp, Erin, u3354279
local.contributor.authoruidRahman, Shakir, u4663718
local.contributor.authoruidWeber, Klaus, u9116880
local.contributor.authoruidStocks, Matthew, u3505308
local.contributor.authoruidBlakers, Andrew, u9113453
local.description.embargo2037-12-31
local.description.notesImported from ARIESen_AU
local.identifier.absfor091204 - Elemental Semiconductors
local.identifier.absfor091306 - Microelectromechanical Systems (MEMS)
local.identifier.absfor090605 - Photodetectors, Optical Sensors and Solar Cells
local.identifier.absseo850504 - Solar-Photovoltaic Energy
local.identifier.ariespublicationU5431022xPUB113
local.identifier.citationvolume24
local.identifier.doi10.1088/0960-1317/24/12/125026en_AU
local.identifier.scopusID2-s2.0-84914689852
local.identifier.thomsonID000345824400026
local.type.statusPublished Versionen_AU

Downloads

Original bundle

Now showing 1 - 1 of 1
Thumbnail Image
Name:
01_Booker_Metal-assisted_chemical_2014.pdf
Size:
614.72 KB
Format:
Adobe Portable Document Format
Download

Collections

ANU Research Publications

DSpace software copyright © 2002-2026 LYRASIS