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Heavy-ion elastic-recoil detection ananlysis of doped-silica films for integrated photonics

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dc.contributor.authorDall (previously Weijers), Tessica
dc.contributor.authorGaff, K
dc.contributor.authorTimmers, Heiko
dc.contributor.authorOphel, T
dc.contributor.authorElliman, Robert
dc.date.accessioned2015-12-13T23:17:53Z
dc.date.issued2000
dc.date.updated2015-12-12T08:54:47Z
dc.description.abstractPhotosensitive Ge- and Sn-doped silica films are being developed for integrated photonics applications. Such films can be deposited by plasma assisted deposition techniques and their initial refractive index and photosensitivity are determined by the Ge(Sn):Si:O stoichiometry. The presence of H in the films is detrimental to their performance because it causes optical absorption in the 1.3-1.5 μm wavelength range of interest for telecommunications. Characterization of the films therefore requires accurate determination of the film composition, including the presence of H. Heavy-ion elastic-recoil detection (ERD) is shown to provide such information in a single measurement.
dc.identifier.issn0168-583X
dc.identifier.urihttp://hdl.handle.net/1885/89912
dc.publisherElsevier
dc.sourceNuclear Instruments and Methods in Physics Research: Section B
dc.subjectKeywords: Chemical analysis; Composition effects; Germanium; Heavy ions; Hydrogen; Integrated optoelectronics; Ion beams; Optical films; Photosensitivity; Refractive index; Thin films; Tin; Heavy ion elastic recoil detection analysis; Ion beam analysis; Silica
dc.titleHeavy-ion elastic-recoil detection ananlysis of doped-silica films for integrated photonics
dc.typeJournal article
local.bibliographicCitation.lastpage628
local.bibliographicCitation.startpage624
local.contributor.affiliationDall (previously Weijers), Tessica, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationGaff, K, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationTimmers, Heiko, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationOphel, T, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationElliman, Robert, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidDall (previously Weijers), Tessica, u9905670
local.contributor.authoruidGaff, K, u9701778
local.contributor.authoruidTimmers, Heiko, u9301401
local.contributor.authoruidOphel, T, u590021
local.contributor.authoruidElliman, Robert, u9012877
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.absfor100507 - Optical Networks and Systems
local.identifier.ariespublicationMigratedxPub20148
local.identifier.citationvolume161
local.identifier.doi10.1016/S0168-583X(99)00850-2
local.identifier.scopusID2-s2.0-0033892617
local.type.statusPublished Version

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