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GISAXS Studies of Structural Modifications in Ion-beam Amorphized Ge

Date

Authors

Desnica-Frankovic, I D

Dubcek, P

Desnica, U V

Bernstorff, S

Ridgway, Mark C

Glover, Christopher

Publisher

Elsevier

Abstract

Grazing incidence small angle scattering of X-rays (GISAXS) was used to analyze structural modifications in implantation-damaged Ge. Samples were implanted by different doses of 74Ge, from 3 × 1012 cm-2 to 3 × 1016 cm-2; at room- or liquid nitrogen-temp

Keywords

Keywords: Amorphization; Amorphous materials; Ion implantation; Microstructure; Porosity; X ray scattering; Amorphous Ge; End-of-range region; GISAXS; Ion doses; Nano-voids; Germanium Amorphous Ge; GISAXS; Ion implantation; Nano-voids; Porosity

URI

http://hdl.handle.net/1885/72438

Collections

ANU Research Publications

Source

Nuclear Instruments and Methods in Physics Research: Section B

Type

Journal article

DOI

10.1016/j.nimb.2006.03.093

Restricted until

2037-12-31

Downloads

File

Description

01_Desnica-Frankovic_GISAXS_Studies_of_Structural_2006.pdf (939.83 KB)