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Thickness-dependent phase transformation in nanoindented germanium thin films

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Date

2008

Authors

Oliver, David
Bradby, Jodie
Williams, James
Swain, Michael Vincent
Munroe, Paul

Journal Title

Journal ISSN

Volume Title

Publisher

Institute of Physics Publishing

Abstract

We investigate the mechanical response of 50-600 nm epitaxial Ge films on a Si substrate using nanoindentation with a nominally spherical (R≈4.3 νm) diamond tip. The inelastic deformation mechanism is found to depend critically on the film thickness. S

Description

Keywords

Keywords: Diamonds; Epitaxial films; Film thickness; Germanium; Magnetic films; Molecular beam epitaxy; Nanoindentation; Semiconducting silicon compounds; Stresses; Thin films; Diamond tips; Elastic stresses; Fracture responses; Ge films; Indenter; Induced dislocat

Citation

URI

http://hdl.handle.net/1885/35833

Collections

ANU Research Publications

Source

Nanotechnology

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1088/0957-4484/19/47/475709

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