Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas
Date
2008
Authors
Corr, Cormac
Despiau-Pujo, E
Chabert, Pascal
Graham, W G
Marro, F.G.
Graves, David B
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Institute of Physics Publishing
Abstract
Comparisons of 2D fluid simulations with experimental measurements of Ar/Cl2 plasmas in a low-pressure inductively coupled reactor are reported. Simulations show that the wall recombination coefficient of Cl atom (γ) is a crucial parameter of the model a
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Journal of Physics D: Applied Physics
Type
Journal article
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2037-12-31
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