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Comparison between fluid simulations and experiments in inductively coupled argon/chlorine plasmas

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Date

2008

Authors

Corr, Cormac
Despiau-Pujo, E
Chabert, Pascal
Graham, W G
Marro, F.G.
Graves, David B

Journal Title

Journal ISSN

Volume Title

Publisher

Institute of Physics Publishing

Abstract

Comparisons of 2D fluid simulations with experimental measurements of Ar/Cl2 plasmas in a low-pressure inductively coupled reactor are reported. Simulations show that the wall recombination coefficient of Cl atom (γ) is a crucial parameter of the model a

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Keywords

Citation

URI

http://hdl.handle.net/1885/56212

Collections

ANU Research Publications

Source

Journal of Physics D: Applied Physics

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1088/0022-3727/41/18/185202

Restricted until

2037-12-31

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01_Corr_Comparison_between_fluid_2008.pdf (243.68 KB)

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