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GaAs delta-doped layers in Si for evaluation of SIMS depth resolution

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Date

2000

Authors

Moon, D-S
Won, J Y
Kim, K J
Kim, H
Kang, H J
Petravic, Mladen

Journal Title

Journal ISSN

Volume Title

Publisher

John Wiley & Sons Inc

Abstract

Description

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Citation

URI

http://hdl.handle.net/1885/89560

Collections

ANU Research Publications

Source

Surface and Interface Analysis

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

Restricted until

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