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Pt surface modification of SnO 2 nanorod arrays for CO and H 2 sensors

Date

Authors

Huang, Hui

Ong, C Y

Guo, Jun

White, Timothy

Tse, Man Siu

Tan, Ooi Kiang

Publisher

Royal Society of Chemistry

Abstract

Uniform SnO2 nanorod arrays were deposited on a 4 inch SiO 2/Si wafer by plasma-enhanced chemical vapor deposition (PEVCD) at low deposition temperature of around 300 °C. The SnO2 nanorods were connected at the roots, thus the nanorod sensors could be fa

Keywords

Keywords: Deposition technique; Dip coating; Fabrication process; Good compatibility; Low deposition temperature; Microelectronic process; Nanorod arrays; Optimal values; Promotion effects; Pt modification; Pt nanoparticles; Scale-up; Sensing performance; Sensing p

URI

http://hdl.handle.net/1885/62952

Collections

ANU Research Publications

Source

Nanoscale

Type

Journal article

DOI

10.1039/c0nr00159g

Restricted until

2037-12-31

Downloads

File

Description

01_Huang_Pt_surface_modification_of_SnO_2010.pdf (484.35 KB)