Wavelength tuning of GaAs/AlGaAs quantum well infrared photo detectors by proton implantation induced intermixing
Date
2000
Authors
Liu, Qiu Xiang
Li, Na
Lu, Wei
Li, Ning
Yuan, X Z
Shen, S C
Fu, Lan
Jagadish, Chennupati
Tan, Hark Hoe
Journal Title
Journal ISSN
Volume Title
Publisher
Japan Society of Applied Physics
Abstract
Proton implantation induced intermixing was used to tune the quantum well infrared photo-detector (QWIP) response wavelength, which may provide a method of fabricating two-color QWIP devices. Obvious red shift of response wavelength as large as 0.6 μm wa
Description
Keywords
Keywords: Implantation; Intermixing; Quantum well; Wavelength tuning
Citation
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Source
Japanese Journal of Applied Physics
Type
Journal article