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Generation of substrate-free III-V nanodisks from user-defined multilayer nanopillar arrays for integration on Si

Date

Authors

Naureen, S

Shahid, Naeem

Dev, A

Anand, S

Publisher

Institute of Physics Publishing

Abstract

High material quality InP-based multilayer nanopillar (NP) arrays are fabricated using a combination of self-assembly of silica particles for mask generation and dry etching. In particular, the NP arrays are made from user-defined epitaxial multilayer sta

Keywords

Keywords: Degree of flexibility; Epitaxial multilayers; Geometrical dimensions; Multilayer stacks; Nano-pillar arrays; Photoluminescence properties; Selective etching; Specific materials; Epitaxial growth; Multilayers; Nanostructures; Silica; Silicon; Substrates

URI

http://hdl.handle.net/1885/60808

Collections

ANU Research Publications

Source

Nanotechnology

Type

Journal article

DOI

10.1088/0957-4484/24/22/225301

Restricted until

2037-12-31

Downloads

File

Description

01_Naureen_Generation_of_substrate-free_2013.pdf (1.21 MB)

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