Synthesis of Carbon Nanofibers and Pt-Nanocluster-Based Electrochemical Microsystems by Combining Low-Pressure Helicon Plasma Techniques

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Caillard, A.
Charles, Christine
Boswell, Roderick
Brault, Pascal

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Institute of Electrical and Electronics Engineers (IEEE Inc)

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Although carbon-nanofiber (CNFs) or nanotube growth and their applications are well documented, engineering their shape and their integration in a microsystem for successful applications is an important issue. We report on the synthesis of aligned CNFs (ACNFs) covered by metallic catalytic nanoclusters by a combination of different low-pressure deposition techniques based on high-density radio-frequency helicon plasmas. An image of a "bright-dress-shape"helicon plasma and of a synthesized ACNF coated by Pt nanoclusters is presented.

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IEEE Transactions on Plasma Science

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2037-12-31