Temperature-dependent mechanical deformation of silicon at the nanoscale: Phase transformation versus defect propagation
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Mangalampalli, S.R.N. Kiran
Tran, Tuan
Smillie, Lachlan
Haberl, Bianca
Subianto, Denny
Williams, James
Bradby, Jodie
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American Institute of Physics (AIP)
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This study uses high-temperature nanoindentation coupled with in situ electrical measurements to investigate the temperature dependence (25-200°C) of the phase transformation behavior of diamond cubic (dc) silicon at the nanoscale. Along with in situ ind
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Journal of Applied Physics
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Open Access
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