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High-quality polarization-insensitive polysiloxane waveguide gratings produced by UV nanoimprint lithography

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dc.contributor.authorHan, Ting
dc.contributor.authorMadden, Steve
dc.contributor.authorLuther-Davies, Barry
dc.contributor.authorCharters, Robbie
dc.date.accessioned2015-12-10T22:39:33Z
dc.date.issued2010
dc.date.updated2016-02-24T12:17:19Z
dc.description.abstractWe describe the fabrication of single-mode polarization-insensitive polysiloxane channel waveguide gratings by a single-step ultraviolet nanoimprint lithography process with a polydimethylsiloxane stamp. A 10-dB deep grating response that matches the theoretically expected response at the first-order resonant wavelength was achieved in a 2-mm-long grating with no excess loss over the intrinsic material absorption. Features down to ∼100 nm could be replicated using the soft stamp.
dc.identifier.issn1041-1135
dc.identifier.urihttp://hdl.handle.net/1885/57228
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE Inc)
dc.sourceIEEE Photonics Technology Letters
dc.subjectKeywords: Grating; Nano-imprint; polydimethylsiloxane (PDMS); Polysiloxanes; Soft lithography; Microchannels; Polarization; Silicones; Waveguides; Nanoimprint lithography Grating; nanoimprint lithography; polydimethylsiloxane (PDMS); polysiloxane; soft lithography; waveguides
dc.titleHigh-quality polarization-insensitive polysiloxane waveguide gratings produced by UV nanoimprint lithography
dc.typeJournal article
local.bibliographicCitation.issue23
local.bibliographicCitation.startpage1720 to 1722
local.contributor.affiliationHan, Ting, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationMadden, Steve, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationLuther-Davies, Barry, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationCharters, Robbie, College of Physical and Mathematical Sciences, ANU
local.contributor.authoruidHan, Ting, u4353785
local.contributor.authoruidMadden, Steve, u4151700
local.contributor.authoruidLuther-Davies, Barry, u7601418
local.contributor.authoruidCharters, Robbie, u960149
local.description.embargo2037-12-31
local.description.notesImported from ARIES
local.identifier.absfor020504 - Photonics, Optoelectronics and Optical Communications
local.identifier.absfor090606 - Photonics and Electro-Optical Engineering (excl. Communications)
local.identifier.absseo970102 - Expanding Knowledge in the Physical Sciences
local.identifier.ariespublicationu9912193xPUB391
local.identifier.citationvolume22
local.identifier.doi10.1109/LPT.2010.2083645
local.identifier.scopusID2-s2.0-78449268147
local.identifier.thomsonID000284227000006
local.type.statusPublished Version

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