Ferroelectric and non-linear dielectric characteristics of Bi₀.₅Na₀.₅TiO₃ thin films deposited via a metallorganic decomposition process
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Xu, Jinbao
Liu, Yun
Withers, Ray L.
Brink, Frank
Yang, Hui
Wang, Mark
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American Institute of Physics (AIP)
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Polycrystalline Bi₀.₅Na₀.₅TiO₃ (NBT) thin films have been successfully fabricated via a metal organic decomposition process on Pt/Ti/SiO₂/Si substrates. The structural evolution of the as-prepared thin filmsannealed over the moderate temperature range 500–700 °C is studied. NBT thin filmsannealed at 700 °C are of single phase NBT perovskite type. They exhibit a well-defined P-E hysteresis loop at room temperature. The measured dielectric constant is 465–410 over the frequency range of 1 kHz to 1 MHz. The corresponding dielectric loss is ∼10⁻². The measured capacitance-voltage curve shows strong non-linear dielectric behavior leading to a high tunability of the dielectric constant, up to 14% at 1 MHz.
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Journal of Applied Physics
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