Resonant Cavity Modes of a Bounded Helicon Discharge
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Chi, Kyeong-Koo
Sheridan, T
Boswell, Roderick
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Institute of Physics Publishing
Abstract
Five distinct discharge modes are observed in a cylindrically-symmetric helicon reactor. Each mode is characterized by its plasma impedance, wave mode structure, density distribution and floating potential structure. It is shown that the lowest two modes
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Plasma Sources Science and Technology
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Restricted until
2037-12-31
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