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Resonant Cavity Modes of a Bounded Helicon Discharge

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Date

Authors

Chi, Kyeong-Koo
Sheridan, T
Boswell, Roderick

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Volume Title

Publisher

Institute of Physics Publishing

Abstract

Five distinct discharge modes are observed in a cylindrically-symmetric helicon reactor. Each mode is characterized by its plasma impedance, wave mode structure, density distribution and floating potential structure. It is shown that the lowest two modes

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Source

Plasma Sources Science and Technology

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License Rights

Restricted until

2037-12-31
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