Breakdown behavior in radio-frequency argon discharges

dc.contributor.authorSmith, H. B.
dc.contributor.authorCharles, C.
dc.contributor.authorBoswell, R. W.
dc.date.accessioned2015-09-11T05:40:12Z
dc.date.available2015-09-11T05:40:12Z
dc.date.issued2003-02-19
dc.description.abstractThe minimum voltage required to break down a dischargeVbrk has long been known to be a strong function of the product of the neutral gas pressure and the electrode separation (pd). This paper investigates the dependence of Vbrk on pd in radio-frequency (rf) systems using experimental, computational and analytic techniques. Experimental measurements of Vbrk in an argon discharge are made for pressures in the range 1–500 mTorr and electrode separations of 2–20 cm. A particle-in-cell simulation is used to investigate a similar pd range and examine the effect of the secondary emission coefficient on the rf breakdown curve, particularly at low pd values. A zero- dimensional global (volume averaged) model is also developed to compare with experimental and simulated measurements of breakdown.en_AU
dc.identifier.issn1070-664Xen_AU
dc.identifier.urihttp://hdl.handle.net/1885/15349
dc.publisherAmerican Institute of Physicsen_AU
dc.rights© 2003 American Institute of Physics. http://www.sherpa.ac.uk/romeo/issn/1070-664X/..."Publishers version/PDF may be used on author's personal website, institutional website or institutional repository" from SHERPA/RoMEO site (as at 11/09/15).en_AU
dc.sourcePhysics of Plasmasen_AU
dc.titleBreakdown behavior in radio-frequency argon dischargesen_AU
dc.typeJournal articleen_AU
dcterms.dateAccepted2003-10-23
local.bibliographicCitation.issue3en_AU
local.bibliographicCitation.lastpage881en_AU
local.bibliographicCitation.startpage875en_AU
local.contributor.affiliationSmith, H. B., Plasma Research Laboratory, Research School of Physical Sciences and Engineering, The Australian National Universityen_AU
local.contributor.affiliationCharles, C., Plasma Research Laboratory, Research School of Physical Sciences and Engineering, The Australian National Universityen_AU
local.contributor.affiliationBoswell, R. W., Plasma Research Laboratory, Research School of Physical Sciences and Engineering, The Australian National Universityen_AU
local.contributor.authoremailhelen.b.smith@anu.edu.auen_AU
local.contributor.authoruidu3739909en_AU
local.identifier.citationvolume10en_AU
local.identifier.doi10.1063/1.1531615en_AU
local.identifier.uidSubmittedByu1005913en_AU
local.publisher.urlhttps://www.aip.org/en_AU
local.type.statusPublished Versionen_AU

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