Oblique incidence ellipsometric characterization and the substrate dependence of visible frequency fishnet metamaterials

Abstract

We use spectroscopic ellipsometry to investigate the angular-dependent optical modes of fishnet metamaterials fabricated by nanoimprint lithography. Spectroscopic ellipsometry is demonstrated as a fast and efficient method for metamaterial characterization and the measured polarization ratios significantly simplify the calibration procedures compared to reflectance and transmittance measurements. We show that the modes can be well identified by a combination of comparing different substrates and considering the angular dependence of the Wood's anomalies. The lack of angular dispersion of the anti-symmetric gap-modes does not agree with the model and requires further theoretical investigation.