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Hydrogen Incorporation, Diffusivity and Evolution in Bulk ZnO

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Date

2003

Authors

Ip, K
Overberg, M E
Heo, Y W
Norton, D P
Pearton, S J
Stutz, C E
Kucheyev, Sergei
Jagadish, Chennupati
Williams, James
Luo, B

Journal Title

Journal ISSN

Volume Title

Publisher

Elsevier

Abstract

Hydrogen is readily incorporated into bulk, single-crystal ZnO during exposure to plasmas at moderate (100-300°C) temperatures. Incorporation depths of >25 μm were obtained in 0.5 h at 300°C, producing a diffusivity of ∼8 × 10-10 cm2/Vs at this temp

Description

Keywords

Keywords: Activation energy; Diffusion; Hydrogen; Plasmas; Secondary ion mass spectrometry; Zinc oxide; Interstitial mechanisms; Single crystals Diffusion; Hydrogen; ZnO

Citation

URI

http://hdl.handle.net/1885/87802

Collections

ANU Research Publications

Source

Solid-State Electronics

Type

Journal article

Book Title

Entity type

Access Statement

License Rights

DOI

10.1016/S0038-1101(03)00207-7

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