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Ion-Beam-Induced Amorphization and Epitaxial Crystallization of Silicon

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Date

2010

Authors

Williams, James
de Azevedo, Gustavo
Bernas, Harry
Fortuna, Frank Nicholas

Journal Title

Journal ISSN

Volume Title

Publisher

Springer

Abstract

Ion-induced collisions produce athermal atomic movements at and around the surface or interface, inducing step formation and modifying growth conditions. The latter may be controlled by varying the temperature and ion-beam characteristics, guiding the sys

Description

Keywords

Citation

URI

http://hdl.handle.net/1885/52190

Collections

ANU Research Publications

Source

Type

Book chapter

Book Title

Topics in Applied Physics 116: Materials Science with Ion Beams

Entity type

Access Statement

License Rights

DOI

10.1007/978-3-540-88789-8_4

Restricted until

2037-12-31

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01_Williams_Ion-Beam-Induced_Amorphization_2010.pdf (7.33 MB)

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