Influence of implantation damage on emitter recombination
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Ratcliff, Thomas
Shalav, Avi
Fong, Kean
Elliman, Robert
Blakers, Andrew
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Elsevier
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In this study the influence of implantation damage on emitter recombination is examined for both boron and phosphorus implanted emitters after thermal processing. Dominant defects are identified and used to describe observed changes in emitter saturation
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Energy Procedia
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Restricted until
2037-12-31
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