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Influence of implantation damage on emitter recombination

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Date

Authors

Ratcliff, Thomas
Shalav, Avi
Fong, Kean
Elliman, Robert
Blakers, Andrew

Journal Title

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Volume Title

Publisher

Elsevier

Abstract

In this study the influence of implantation damage on emitter recombination is examined for both boron and phosphorus implanted emitters after thermal processing. Dominant defects are identified and used to describe observed changes in emitter saturation

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Citation

Source

Energy Procedia

Book Title

Entity type

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Restricted until

2037-12-31