Silicon/silicon oxide/LPCVD silicon nitride stacks: the effect of oxide thicknoww on bulk damage and surface passivation

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dc.contributor.authorJin, Haoen_AU
dc.contributor.authorWeber, Klausen_AU
dc.contributor.authorBlakers, Andrewen_AU
dc.coverage.spatialBarcelona Spain
dc.date.accessioned2015-12-13T23:05:35Z
dc.date.available2015-12-13T23:05:35Z
dc.date.createdJune 6 2005
dc.date.issued2005
dc.date.updated2015-12-12T08:01:08Z
dc.identifier.isbn3936338191
dc.identifier.urihttp://hdl.handle.net/1885/85601
dc.publisherWIP-Renewable Energies
dc.relation.ispartofseriesEuropean Photovoltaic Solar Energy Conference 2005
dc.sourceProceedings of the 20th European Photovoltaic Solar Energy Conference
dc.source.urihttp://www.wip-munich.de
dc.titleSilicon/silicon oxide/LPCVD silicon nitride stacks: the effect of oxide thicknoww on bulk damage and surface passivation
dc.typeConference paper
local.bibliographicCitation.lastpage232
local.bibliographicCitation.startpage230
local.contributor.affiliationJin, Hao, College of Engineering and Computer Science, ANU
local.contributor.affiliationWeber, Klaus, College of Engineering and Computer Science, ANU
local.contributor.affiliationBlakers, Andrew, College of Engineering and Computer Science, ANU
local.contributor.authoruidJin, Hao, u4065013
local.contributor.authoruidWeber, Klaus, u9116880
local.contributor.authoruidBlakers, Andrew, u9113453
local.description.notesImported from ARIES
local.description.refereedNo
local.identifier.absfor090699 - Electrical and Electronic Engineering not elsewhere classified
local.identifier.ariespublicationMigratedxPub14087
local.type.statusPublished Version

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